Kursplan för |
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| MKM110 - Microsystems technology |
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| Kursplanen fastställd 2012-02-22 av programansvarig (eller motsvarande) |
| Ägare: MPNAT |
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7,5 Poäng |
| Betygskala: TH - Fem, Fyra, Tre, Underkänt |
| Utbildningsnivå: Avancerad nivå |
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Huvudområde: Elektroteknik |
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Institution: 59 - MIKROTEKNOLOGI OCH NANOVETENSKAP
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Undervisningsspråk: Engelska
Sökbar för utbytesstudenter
Blockschema:
C
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Poängfördelning |
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Tentamensdatum |
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Lp1 |
Lp2 |
Lp3 |
Lp4 |
Sommarkurs |
Ej Lp |
| 0104 |
Tentamen |
7,5hp |
Betygskala: TH |
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7,5hp
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18 Dec 2012 em M, |
06 Apr 2013 fm V, |
30 Aug 2013 em V |
I program
MPEES EMBEDDED ELECTRONIC SYSTEM DESIGN, MSC PROGR, Årskurs 2 (valbar)
MPNAT NANOTECHNOLOGY, MSC PROGR, Årskurs 2 (valbar)
Examinator:
Docent
Anke Sanz-Velasco
Docent
Per Lundgren
Professor
Peter Enoksson
Gå till kurshemsida
Behörighet:
För kurser inom Chalmers utbildningsprogram gäller samma behörighetskrav som till de(t) program kursen ingår i.
Kursspecifika förkunskaper
Preferably you should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering. The examinator of the course can make exceptions in special cases.
Syfte
To give the participants general knowledge and deeper understanding of
modern silicon based microsensors, microactuators and microsystems.
Lärandemål (efter fullgjord kurs ska studenten kunna)
- explain when and why modern silicon based microsystems are useful
Examined: written exam
- describe the basic principles of silicon based microfabrication
Examined: written exam
- draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like
Examined: written exam
- describe the function of a wide range of microdevices
Examined: written exam
- consider and evaluate effects of miniaturization for (transducer) device functionality
Examined: written exam
- discuss microdevice design and fabrication considerations
Examined: project meetings, written exam
- critically scrutinize results from electrical measurements on microstructures
Examined: written exam
- present project results in a scientific way in written and oral form
Examined: project report and presentation
Innehåll
Techniques for microsystem fabrication
Review of principles for realization of microstructures
Measurement techniques
Device examples, provided also by guest lecturers from industry and company visit to producers of micromechanical sensors
Project work where the design, fabrication and evaluation of a micromechanical sensor is demonstrated
Organisation
A lecture series is provided throughout the course.
Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.
Fabrication demonstrations in our cleanroom facility, COMSOL tutorials, a characterization exercize in the measurement laboratory and visit to a local company in the field are compulsory elements.
A major part of the studies is in the form a project work concerning the conceptualization, design and (planned) fabrication of a microstructured device. A literature study and the project presentation (written and oral) are also included in the project work.
Litteratur
Recommendations
Introductory MEMS, Fabrication and Applications, T. M. Adams, R. A. Layton, Springer, ISBN 978-0-387-09510-3
Microsensors MEMS and Smart devices, Julien W. Gardner, Vijay K. Varadan and Osama O Awadelkarim, John Wiley & Sons, ISBN 0-471-86109-X.
Micromachined Transducers Sourcesbook, Gregory T.A. Kovacs, WCB/McGraw-Hill, ISBN 0-07-290722-3
Examination
The course consists of two parts in the form of a lecture series and a project work done by groups of up to 5 students each. The final grade for each student is determined from the results of a mandatory written exam, a written report and oral presentation of the project work.
A mandatory industry site visit at a company that works with systems relevant to the course content is also included in the course.