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Institutionernas kurser för doktorander

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Kursplan för

Läsår
MKM110 - Microsystems technology
 
Kursplanen fastställd 2012-02-22 av programansvarig (eller motsvarande)
Ägare: MPNAT
7,5 Poäng
Betygskala: TH - Fem, Fyra, Tre, Underkänt
Utbildningsnivå: Avancerad nivå
Huvudområde: Elektroteknik
Institution: 59 - MIKROTEKNOLOGI OCH NANOVETENSKAP


Undervisningsspråk: Engelska
Sökbar för utbytesstudenter
Blockschema: C

Modul   Poängfördelning   Tentamensdatum
Lp1 Lp2 Lp3 Lp4 Sommarkurs Ej Lp
0104 Tentamen 7,5hp Betygskala: TH   7,5hp   18 Dec 2012 em M,  06 Apr 2013 fm V,  30 Aug 2013 em V

I program

MPEES EMBEDDED ELECTRONIC SYSTEM DESIGN, MSC PROGR, Årskurs 2 (valbar)
MPNAT NANOTECHNOLOGY, MSC PROGR, Årskurs 2 (valbar)

Examinator:

Docent  Anke Sanz-Velasco
Docent  Per Lundgren
Professor  Peter Enoksson



  Gå till kurshemsida

Behörighet:

För kurser inom Chalmers utbildningsprogram gäller samma behörighetskrav som till de(t) program kursen ingår i.

Kursspecifika förkunskaper

Preferably you should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering. The examinator of the course can make exceptions in special cases.

Syfte

To give the participants general knowledge and deeper understanding of
modern silicon based microsensors, microactuators and microsystems.

Lärandemål (efter fullgjord kurs ska studenten kunna)



  • explain when and why modern silicon based microsystems are useful
    Examined: written exam


  • describe the basic principles of silicon based microfabrication
    Examined: written exam


  • draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like
    Examined: written exam


  • describe the function of a wide range of microdevices
    Examined: written exam


  • consider and evaluate effects of miniaturization for (transducer) device functionality
    Examined: written exam


  • discuss microdevice design and fabrication considerations
    Examined: project meetings, written exam


  • critically scrutinize results from electrical measurements on microstructures
    Examined: written exam


  • present project results in a scientific way in written and oral form
    Examined: project report and presentation

Innehåll

Techniques for microsystem fabrication
Review of principles for realization of microstructures
Measurement techniques
Device examples, provided also by guest lecturers from industry and company visit to producers of micromechanical sensors
Project work where the design, fabrication and evaluation of a micromechanical sensor is demonstrated

Organisation

A lecture series is provided throughout the course.

Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.

Fabrication demonstrations in our cleanroom facility, COMSOL tutorials, a characterization exercize in the measurement laboratory and visit to a local company in the field are compulsory elements.

A major part of the studies is in the form a project work concerning the conceptualization, design and (planned) fabrication of a microstructured device. A literature study and the project presentation (written and oral) are also included in the project work.

Litteratur

Recommendations
Introductory MEMS, Fabrication and Applications, T. M. Adams, R. A. Layton, Springer, ISBN 978-0-387-09510-3

Microsensors MEMS and Smart devices, Julien W. Gardner, Vijay K. Varadan and Osama O Awadelkarim, John Wiley & Sons, ISBN 0-471-86109-X.

Micromachined Transducers Sourcesbook, Gregory T.A. Kovacs, WCB/McGraw-Hill, ISBN 0-07-290722-3

Examination

The course consists of two parts in the form of a lecture series and a project work done by groups of up to 5 students each. The final grade for each student is determined from the results of a mandatory written exam, a written report and oral presentation of the project work.
A mandatory industry site visit at a company that works with systems relevant to the course content is also included in the course.


Sidansvarig Publicerad: må 13 jul 2020.