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Syllabus for

Academic year
FKA196 - Fundamentals of micro- and nanotechnology
 
Owner: FNMAS
5,0 Credits (ECTS 7,5)
Grading: TH - Five, Four, Three, Not passed
Level: D
Department: 59 - MICROTECHNOLOGY AND NANOSCIENCE


Teaching language: English

Course module   Credit distribution   Examination dates
Sp1 Sp2 Sp3 Sp4 No Sp
0106 Examination 5,0 c Grading: TH   5,0 c   26 Oct 2006 am V,  Contact examiner

In programs

FNMAS MSc PROGRAMME IN NANOSCALE SCIENCE AND TECHNOLOGY, Year 1 (compulsory)
MAMAS MSc PROGR IN ADVANCED MATERIALS - Electronic materials technology, Year 1 (elective)
TTFYA ENGINEERING PHYSICS, Year 4 (elective)
MTMAS MSc PROGR IN MICROSYSTEM INTEGRATION TECHNOLOGY, Year 1 (compulsory)

Examiner:

Bitr professor  Avgust Yurgens
Univ lektor  Ulf Södervall


Replaces

FKA195   Nanoscale technology: thin films and materials


Eligibility:

For single subject courses within Chalmers programmes the same eligibility requirements apply, as to the programme(s) that the course is part of.

Aim

Microelectronics has had tremendous development during the last ten years broadening the field of applications in many directions. The industry is pushing the critical device dimensions downward the nanometer scale at a very rapid rate. This would not have been possible without development of thin film technology, nanoprocessing, and material science. A great many sophisticated instruments and techniques, developed to process and characterize thin films and surfaces, have already becom indispensable in virtually every research area and high-tech industry. While the major exploitation of thin films i associated with microelectronics, there are numerous and growing novel applications in communication, optical electronics, energetics, coating, data storage, etc. Further development requires a continuous search for new materials advanced methods of deposition, nanoprocessing and characterization of thin films.

The course aims at giving a basic knowledge of modern nanoscale thin-film technology, characterization techniques and emerging thin film materials and applications. Laboratory exercises in the clean room of the Microtechnology Centre at Chalmers (MC2) will demonstrate how the nanoscale machinery operates in reality.

Goal

The goal is to learn material science aspects and physical principles of nanoscale technology, which will help students to understand the link between Processing- Structure- Properties- Performance of thin film devices and to be capable of choosing proper materials, deposition and characterization techniques for a given task. The course will make an overview over an actual research and development and most recent trends in nanoscale technology and will provide a basis for further studies at the undergraduate and postgraduate level, diploma work and professional preparation.

Content

The core of the course is dedicated to the theory and practice of thin-film techniques, one of the most important constituents of modern Nanoscale Technology. Various thin film deposition technologies will be covered in detail including thermal-evaporation, sputtering, chemical-vapor deposition and epitaxy. During the lectures students will also study the technology of vacuum systems including system operation and design, and the physical behavior of gases. Film formation, its structure and methods of characterization will be explained. Various physical properties of thin films: mechanical, electrical, magnetic, and optical will be covered, with an emphasis on the actual research and development in the thin film nanoscale technology and emerging practical applications of novel thin-films materials, like superlattices, diamond films, carbon-nanotubes, films for magnetic recording, and high-Tc superconductor films.

Organisation

This course includes lectures and several demonstrations involving both deposition and simple characterization of thin films and a literature project. A number of simple home assignments will be given to deepen the knowledge obtained during the lectures. See the course home page for more information.

Literature

"Introduction to Microelectronic Fabrication"
by Richard C. Jaeger (ISBN: 0-201-44494-7)

Lecture notes will be delivered electronically before the corresponding lectures.

Examination

Written examination.

Bonus points (up to 25% of the total score) will be given for fulfillment of the literature project (10%) and home assignments (15%).


Page manager Published: Mon 28 Nov 2016.