Syllabus for |
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| MKM110 - Microsystem technology |
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| Owner: MTMAS |
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5,0 Credits (ECTS 7,5) |
| Grading: TH - Five, Four, Three, Not passed |
| Level: B |
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Department: 59 - MICROTECHNOLOGY AND NANOSCIENCE
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Teaching language: English
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Credit distribution |
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Examination dates |
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Sp1 |
Sp2 |
Sp3 |
Sp4 |
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No Sp |
| 0104 |
Examination |
5,0 c |
Grading: TH |
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5,0 c
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19 Dec 2006 am V, |
11 Apr 2007 am V, |
28 Aug 2007 pm V |
In programs
MTMAS MSc PROGR IN MICROSYSTEM INTEGRATION TECHNOLOGY, Year 1 (compulsory)
TAUTA AUTOMATION AND MECHATRONICS ENGENEERING, Year 4 (elective)
Examiner:
Professor
Peter Enoksson
Eligibility:
For single subject courses within Chalmers programmes the same eligibility requirements apply, as to the programme(s) that the course is part of.
Course specific prerequisites
You should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering.
Aim
The aim is to give students general knowledge and a deeper understanding of modern silicon based microsensors, microactuators and microsystem, along with an introduction to the fabrication technologies used. The course will result in an understanding of various measurement principles for non-electrical quantities as well as an understanding of the potential and limitations of miniaturization from a systems/application perspective. The students will also get practical experience in microfabrication of sensors and actuators through independent project work including evaluation of microstructure fabricated by the students.
Content
The aim is to give students general knowledge and a deeper understanding of modern silicon based microsensors, microactuators and microsystem, along with an introduction to the fabrication technologies used. The course will result in an understanding of various measurement principles for non-electrical quantities as well as an understanding of the potential and limitations of miniaturization from a systems/application perspective. The students will also get practical experience in microfabrication of sensors and actuators through independent project work including evaluation of microstructure fabricated by the students
Organisation
Guest lecturers from the industry describe commercialized micromechanical sensors and gives insight into how microsystems can be commercialized.
Industry visit to a company that develops and produces micromechanical sensors. 6 hours
Project work where a micromechanical sensor is fabricated and evaluated. A literature study is also included in the project work.
Literature
Micromachined Transducers - Sourcebook, by Gregory T. Kovac, McGraw-Hill , 1998.
Lab handbook, reference text / articles, and other written information distributed during the course.
Examination
The course consists of two parts in the form of a lecture series and a project work done by groups of up to 5 students each. The final grade for each student is determined from the results from the mandatory written exam (5 individual optional homework tasks gives credit points on the exam) plus a written report and oral presentation of the project work). An optional individual in-depth assignment also exists, which is graded through an oral examination (10-15 min.) with the course coordinator. This in-depth assignment consists of reading one or two scientific articles providing a deeper knowledge of a certain area in microsystem technology. The particular area of microsystem technology is determined depending on the student s background and interests. A mandatory industry site visit (6 hours) at a company that works with systems relevant to the course content is also included in the course.