Syllabus for |
|
| FKA195 - Nanoscale technology: thin films and materials |
| |
| Owner: FNMAS |
|
|
4,0 Credits (ECTS 6) |
| Grading: TH - Five, Four, Three, Not passed |
| Level: C |
|
Department: 59 - MICROTECHNOLOGY AND NANOSCIENCE
|
Teaching language: English
| Course module |
|
Credit distribution |
|
Examination dates |
|
Sp1 |
Sp2 |
Sp3 |
Sp4 |
|
No Sp |
| 0102 |
Oral examination |
4,0 c |
Grading: TH |
|
|
4,0 c
|
|
|
|
|
|
|
In programs
MTMAS MSc PROGR IN MICROSYSTEM INTEGRATION TECHNOLOGY, Year 1 (elective)
FNMAS MSc PROGRAMME IN NANOSCALE SCIENCE AND TECHNOLOGY, Year 1 (compulsory)
TTFYA ENGINEERING PHYSICS, Year 4 (elective)
MAMAS MSc PROGR IN ADVANCED MATERIALS - Electronic materials technology, Year 1 (elective)
TKEFA CHEMICAL ENGINEERING WITH ENGINEERING PHYSICS, Year 4 (elective)
Examiner:
Bitr professor
Avgust Yurgens
Eligibility:
For single subject courses within Chalmers programmes the same eligibility requirements apply, as to the programme(s) that the course is part of.
Course specific prerequisites
None
Aim
Motivation
Microelectronics has had tremendous development during the last ten
years broadening the field of applications in many directions. The
industry is pushing the critical device dimensions downward the nanometer scale at a very rapid rate. This would not have been possible without development of thin film technology, nanoprocessing, and material science. A great many sophisticated instruments and techniques,
developed to process and characterize thin films and surfaces, have already become indispensable in virtually every research area and
high-tech industry. While the major exploitation of thin films is
associated with microelectronics, there are numerous and growing novel applications in communication, optical electronics, energetics, coating, data storage, etc. Further development requires a continuous search for new materials advanced methods of deposition, nanoprocessing and
characterization of thin films.
Aim
The course aims at giving a basic knowledge of modern nanoscale
thin-film technology, characterization techniques and emerging thin film
materials and applications. Laboratory exercises in the clean room o the Microtechnology Centre atChalmers (MC2) will demonstrate how the nanoscale machinery operates in reality.
Goal
The goal is to learn material science aspects and physical principles of
nanoscale technology, which will help students to understand the link
between Processing-Structure-Properties-Performance of thin film devices and to be capable of choosing proper materials, deposition and
characterization techniques for a given task. The course will make an
overview over an actual research and development and most recent trends
in nanoscale technology and will provide a basis for further studies at
the undergraduate and postgraduate level, diploma work and professional
preparation.
Content
The core of the course is dedicated to the theory and practice of thin-film techniques, one of the most important constituents of modern Nanoscale Technology. Various thin film deposition technologies will be covered in detail including thermal-evaporation, sputtering, chemical-vapor deposition and epitaxy. During the lectures students will also study the technology of vacuum systems including system operation and design, and the physical behavior of gases.Film formation, its structure and methods of characterization will be explained. Various physical properties of thin films: mechanical, electrical, magnetic, and optical will be covered, with an emphasis on the actual research and development in the thin film nanoscale technology and emerging practical applications of novel thin-films materials, like superlattices, diamond films, carbon-nanotubes, films for magnetic recording, and high-Tc superconductor films.
Organisation
This course includes 28 hours of lectures, 10 hours of demonstrations involving both deposition and simple characterization of thin films and a literature project for 8 hours. A number of simple home assignments will be given to deepen the knowledge obtained during the lectures.
See http://fy.chalmers.se/~yurgens/FKA195/FKA195.htm for more information.
Literature
The course will be based on the book: The Materials Science of Thin Films by Milton Ohring; Publisher: Academic Press 2001; ISBN: 0125249756.
Lecture notes are delivered electronically before lectures.
Examination
Oral examination
Bonus points (up to 25% of the total score) will be given for fulfillment of the literature project (10%) and home assignments (15%).