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Syllabus for

Academic year
MKM110 - Microsystem technology
 
Owner: MTMAS
5,0 Credits (ECTS 7,5)
Grading: TH - Five, Four, Three, Not passed
Level: A
Department: 59 - MICROTECHNOLOGY AND NANOSCIENCE


Teaching language: English

Course module   Credit distribution   Examination dates
Sp1 Sp2 Sp3 Sp4 No Sp
0104 Examination 5,0 c Grading: TH   5,0 c   Contact examiner

In programs

TAUTA AUTOMATION AND MECHATRONICS ENGENEERING, Year 4 (elective)
MTMAS MSc PROGR IN MICROSYSTEM INTEGRATION TECHNOLOGY, Year 1 (compulsory)

Examiner:

Professor  Johan Liu



Eligibility:

For single subject courses within Chalmers programmes the same eligibility requirements apply, as to the programme(s) that the course is part of.

Course specific prerequisites

You should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering.

Aim

The aim is to give students general knowledge and a deeper understanding of modern silicon based microsensors, microactuators and microsystem, along with an introduction to the fabrication technologies used. The course will result in an understanding of various measurement principles for non-electrical quantities as well as an understanding of the potential and limitations of miniaturization from a systems/application perspective. The students will also get practical experience in microfabrication of sensors and actuators through independent project work including evaluation of microstructure fabricated by the students.

Content

The aim is to give students general knowledge and a deeper understanding of modern silicon based microsensors, microactuators and microsystem, along with an introduction to the fabrication technologies used. The course will result in an understanding of various measurement principles for non-electrical quantities as well as an understanding of the potential and limitations of miniaturization from a systems/application perspective. The students will also get practical experience in microfabrication of sensors and actuators through independent project work including evaluation of microstructure fabricated by the students

Organisation

Guest lecturers from the industry describe commercialized micromechanical sensors and gives insight into how microsystems can be commercialized.

Industry visit to a company that develops and produces micromechanical sensors. 6 hours

Project work where a micromechanical sensor is fabricated and evaluated. A literature study is also included in the project work.

Literature

Micromachined Transducers - Sourcebook, by Gregory T. Kovac, McGraw-Hill , 1998.

Lab handbook, reference text / articles, and other written information distributed during the course.

Examination

The course consists of two parts in the form of a lecture series and a project work done by groups of up to 5 students each. The final grade for each student is determined from the results from the mandatory written exam (5 individual optional homework tasks gives credit points on the exam) plus a written report and oral presentation of the project work). An optional individual in-depth assignment also exists, which is graded through an oral examination (10-15 min.) with the course coordinator. This in-depth assignment consists of reading one or two scientific articles providing a deeper knowledge of a certain area in microsystem technology. The particular area of microsystem technology is determined depending on the student s background and interests. A mandatory industry site visit (6 hours) at a company that works with systems relevant to the course content is also included in the course.


Page manager Published: Thu 03 Nov 2022.