Syllabus for |
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| MKM110 - Microsystems technology |
| Mikrosystemteknik |
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| Syllabus adopted 2019-02-19 by Head of Programme (or corresponding) |
| Owner: MPNAT |
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7,5 Credits
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| Grading: TH - Pass with distinction (5), Pass with credit (4), Pass (3), Fail |
| Education cycle: Second-cycle |
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Major subject: Electrical Engineering
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Department: 59 - MICROTECHNOLOGY AND NANOSCIENCE
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Course round 1
Teaching language: English
Application code: 18113
Open for exchange students: Yes
Block schedule:
C
Maximum participants: 30
| Module |
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Credit distribution |
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Examination dates |
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Sp1 |
Sp2 |
Sp3 |
Sp4 |
Summer course |
No Sp |
| 0104 |
Examination |
7,5 c |
Grading: TH |
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7,5 c
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12 Jan 2021 am J_DATA 
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07 Apr 2021 pm J, |
26 Aug 2021 pm J |
In programs
MPEES EMBEDDED ELECTRONIC SYSTEM DESIGN, MSC PROGR, Year 2 (elective)
MPNAT NANOTECHNOLOGY, MSC PROGR, Year 2 (elective)
Examiner:
Peter Enoksson
Go to Course Homepage
Course round 2
Teaching language: English
Application code: 99229
Open for exchange students: No
Maximum participants: 20
Only students with the course round in the programme plan
| Module |
|
Credit distribution |
|
Examination dates |
|
Sp1 |
Sp2 |
Sp3 |
Sp4 |
Summer course |
No Sp |
| 0104 |
Examination |
7,5 c |
Grading: TH |
|
|
7,5 c
|
|
|
|
|
|
|
Examiner:
Peter Enoksson
Go to Course Homepage
Eligibility
General entry requirements for Master's level (second cycle)
Applicants enrolled in a programme at Chalmers where the course is included in the study programme are exempted from fulfilling the requirements above.
Specific entry requirements
English 6 (or by other approved means with the equivalent proficiency level)
Applicants enrolled in a programme at Chalmers where the course is included in the study programme are exempted from fulfilling the requirements above.
Course specific prerequisites
Preferably you should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering. The examinator of the course can make exceptions in special cases.
Aim
To give the participants general knowledge and deeper understanding of
modern silicon based microsensors, microactuators and microsystems.
Learning outcomes (after completion of the course the student should be able to)
- explain when and why modern silicon based microsystems are useful
Examined: written exam
- describe the basic principles of silicon based microfabrication
Examined: written exam
- draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like
Examined: written exam
- describe the function of a wide range of microdevices
Examined: written exam
- consider and evaluate effects of miniaturization for (transducer) device functionality
Examined: written exam
- discuss microdevice design and fabrication considerations
Examined: project meetings, written exam
- critically scrutinize results from electrical measurements on microstructures
Examined: written exam
- present project results in a scientific way in written and oral form
Examined: project report and presentation
Content
Techniques for microsystem fabrication
Review of principles for realization of microstructures
Measurement techniques
Device examples, provided also by guest lecturers from the industry and company visit to producers of micromechanical sensors
Project work where the design, fabrication and evaluation of a micromechanical sensor is demonstrated
Organisation
A lecture series is provided throughout the course.
Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.
Fabrication demonstrations in our cleanroom facility, COMSOL tutorials, a characterization exercize in the measurement laboratory and visit to a local company in the field are compulsory elements.
A major part of the studies is in the form a project work concerning the conceptualization, design and (planned) fabrication of a microstructured device. A literature study and the project presentation (written and oral) are also included in the project work.
Literature
Recommendations
Introductory MEMS, Fabrication and Applications, T. M. Adams, R. A. Layton, Springer, ISBN 978-0-387-09510-3
Microsensors MEMS and Smart devices, Julien W. Gardner, Vijay K. Varadan and Osama O Awadelkarim, John Wiley & Sons, ISBN 0-471-86109-X.
Micromachined Transducers Sourcesbook, Gregory T.A. Kovacs, WCB/McGraw-Hill, ISBN 0-07-290722-3
Examination including compulsory elements
The course consists of two parts in the form of a lecture series and a project work done by groups of up to 3 students. The final grade for each student is determined from the results of a mandatory written exam, a written report and oral presentation of the project work.
In order to pass the student must have participated in the fabrication demonstration in the cleanroom, simulation exercise with COMSOL, characterization exercise in the measuerment lab and a company visit.