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Graduate courses

Departments' graduate courses for PhD-students.


Syllabus for

Academic year
MKM110 - Microsystems technology  
Syllabus adopted 2015-02-20 by Head of Programme (or corresponding)
Owner: MPNAT
7,5 Credits
Grading: TH - Five, Four, Three, Not passed
Education cycle: Second-cycle
Major subject: Electrical Engineering

Teaching language: English
Open for exchange students
Block schedule: C

Course module   Credit distribution   Examination dates
Sp1 Sp2 Sp3 Sp4 Summer course No Sp
0104 Examination 7,5 c Grading: TH   7,5 c   16 Jan 2016 am SB   04 Apr 2016 am M,  25 Aug 2016 pm M

In programs



Docent  Per Lundgren
Professor  Peter Enoksson


In order to be eligible for a second cycle course the applicant needs to fulfil the general and specific entry requirements of the programme that owns the course. (If the second cycle course is owned by a first cycle programme, second cycle entry requirements apply.)
Exemption from the eligibility requirement: Applicants enrolled in a programme at Chalmers where the course is included in the study programme are exempted from fulfilling these requirements.

Course specific prerequisites

Preferably you should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering. The examinator of the course can make exceptions in special cases.


To give the participants general knowledge and deeper understanding of
modern silicon based microsensors, microactuators and microsystems.

Learning outcomes (after completion of the course the student should be able to)

  • explain when and why modern silicon based microsystems are useful
    Examined: written exam

  • describe the basic principles of silicon based microfabrication
    Examined: written exam

  • draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like
    Examined: written exam

  • describe the function of a wide range of microdevices
    Examined: written exam

  • consider and evaluate effects of miniaturization for (transducer) device functionality
    Examined: written exam

  • discuss microdevice design and fabrication considerations
    Examined: project meetings, written exam

  • critically scrutinize results from electrical measurements on microstructures
    Examined: written exam

  • present project results in a scientific way in written and oral form
    Examined: project report and presentation


Techniques for microsystem fabrication
Review of principles for realization of microstructures
Measurement techniques
Device examples, provided also by guest lecturers from the industry and company visit to producers of micromechanical sensors
Project work where the design, fabrication and evaluation of a micromechanical sensor is demonstrated


A lecture series is provided throughout the course.

Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.

Fabrication demonstrations in our cleanroom facility, COMSOL tutorials, a characterization exercize in the measurement laboratory and visit to a local company in the field are compulsory elements.

A major part of the studies is in the form a project work concerning the conceptualization, design and (planned) fabrication of a microstructured device. A literature study and the project presentation (written and oral) are also included in the project work.


Introductory MEMS, Fabrication and Applications, T. M. Adams, R. A. Layton, Springer, ISBN 978-0-387-09510-3

Microsensors MEMS and Smart devices, Julien W. Gardner, Vijay K. Varadan and Osama O Awadelkarim, John Wiley & Sons, ISBN 0-471-86109-X.

Micromachined Transducers Sourcesbook, Gregory T.A. Kovacs, WCB/McGraw-Hill, ISBN 0-07-290722-3


The course consists of two parts in the form of a lecture series and a project work done by groups of up to 3 students. The final grade for each student is determined from the results of a mandatory written exam, a written report and oral presentation of the project work.
In order to pass the student must have participated in the fabrication demonstration in the cleanroom, simulation exercise with COMSOL, characterization exercise in the measuerment lab and a company visit.

Page manager Published: Thu 04 Feb 2021.